Hermetic package sealing processes with solder or glass frit are used to isolate critical microelectronic circuits from the surrounding environment. Hermetic packaging materials are usually ceramic or metal and are sealed with a metal solder or solder-glass joint.

The Model 3150 High Vacuum Furnace is used for activating getters, sealing of discrete MEMS packages, and other sealing and brazing processes. Packages are hermetically sealed with very low vacuum and moisture levels for extended, long term performance.

SST 3150 High Vacuum Furnace
5100 Vacuum Pressure Furnace

The 5100 Vacuum Pressure Furnace is used for high production void-free soldering of microelectronic packages and components. Its vacuum and pressure furnace provides precise automatic control of heating and cooling ramp rates. Process heating is provided over the entire work area by a close-coupled planar infrared heating element. This system allows for heating up to 500°C and cooling in an inert gas environment from vacuum levels below 50 millitorr to pressures up to 40 psig.

SST 3130 Vacuum Pressure Furnace. The Model 3130 Vacuum Pressure Furnace is used for production soldering, glass sealing, and brazing of microelectronic packages and components. A deep chamber resistive heat vacuum and pressure furnace for void free solder joints without use of flux, resulting in high precision electronic components.
3130 Vacuum Pressure Furnace