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3150 High Vacuum Furnace

The SST 3150 is designed to create high reliability MEMS packages. Packages are hermetically sealed with very low vacuum and moisture levels for extended, long term performance. The 3150 provides vacuum levels as low as 10-7 Torr, and temperatures up to 500°C (1000°C optional). The clean-room compatible system may also be configured to allow for in situ separation of lid and package, getter firing and sealing of MEMS packages. The 3150 utilizes a turbo-molecular drag pump for effective pumping of hydrogen gas molecules. An optional cryogenic water pump may be added to the system for processes requiring extremely low levels of residual water vapor.

3150 High Vacuum Furnace

The SST 3150 is designed to create high reliability MEMS packages. Packages are hermetically sealed with very low vacuum and moisture levels for extended, long term performance. The 3150 provides vacuum levels as low as 10-7 Torr, and temperatures up to 500°C (1000°C optional). The clean-room compatible system may also be configured to allow for in situ separation of lid and package, getter firing and sealing of MEMS packages. The 3150 utilizes a turbo-molecular drag pump for effective pumping of hydrogen gas molecules. An optional cryogenic water pump may be added to the system for processes requiring extremely low levels of residual water vapor.

Category
High-Vacuum Furnaces

Processes
  1. Glass to Metal Sealing
  2. High Vacuum MEMs Packaging
  3. Hermetic Package Sealing
  4. Solder Paste Reflow Attach
  5. Fluxless Eutectic Solder Attach

Applications
  • MEMS Package Sealing
  • Infrared Sensor Package Sealing
  • Hermetic Package Sealing
  • Crystal Oscillator Package Sealing
  • Wafer Level Packaging
  • Void-Free Eutectic Die Attach
  • Low Moisture Package Sealing
  • Noble Gas Miniature Lamp Sealing
  • Military Electronic Package Sealing

Media

3150 Open Chamber
3150 Tooling Example
3150 Operator Interaction
3150 Chamber View

KEY FEATURES

Formic Acid
Extended Temperature
Getter Activation
Run Analyzer
Graphite Tooling
Formic Acid Extended Temperature Getter Activation Run Analyzer Graphite Tooling
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