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AVS-4000 Automated High Vacuum Furnace

Overview

The SST AVS-4000 is a high-vacuum multi-atmosphere sealing furnace that is custom designed for automated sealing operations as one element of an integrated production system. The furnace is fully operational at temperatures up to 500°C, vacuum levels as low as 10-7 Torr and automatic selection and electronic control of up to three process gasses.

AVS-4000 Automated High Vacuum Furnace
AVS-4000 work area

The AVS-4000 benefits include:

  • Robotic tooling load and unload from in-line transfer stations
  • Combination of capabilities: void-free soldering, high vacuum MEMS package sealing, hermetic package sealing
  • Fixturing to precisely locate package components
  • Application of precise thermal profiles in vacuum and positive inert gas pressures

Processes

Void-Free Die Soldering. Void-free die and substrate solder attach is used to create a uniform thermal interface for high-reliability microelectronic devices.

High Vacuum MEMS Package Sealing. Advanced MEMS devices require internal vacuum levels on the order of 1 millitorr over the life of the device. Sealing of these MEMS packages requires specialized thermal processing in high vacuum system.

Hermetic Package Sealing. Hermetic package sealing uses solder or glass to create a barrier to moisture which will damage sensitive electrical circuit components.

Selected AVS-400 specifications

  • Turbomolecular drag vacuum pump type
  • Cryogenic Water Pump optional
  • 100° to 500°C operating temperature
  • Thermal Work Zone 50 in sq (320 cm sq)

Applications

  • Accelerometers
  • Night vision IR sensors
  • Atomic clocks
  • Oscillators
  • Automotive sensors
  • Pressure sensors
  • High accuracy gyroscopes
  • Solid oxide fuel cells
  • MEMS devices
  • Uncooled microbolometers
  • Miniature crystals

Download AVS-4000 Automated High Vacuum furnace Data Sheet

Download AVS-4000 Automated High Vacuum furnace Data Sheet

Graphite, ceramic, and metal fixtures are required for most microelectronic assembly processes. Learn more about tooling.
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