MEMS devices typically combine electronic circuitry with mechanical structures to produce different outcomes. With optical switches, the key mechanical components are MEMS-based micro-machined mirrors. These are created with silicon chips using well-established, very-large-scale integration and complementary metal-oxide semiconductor (CMOS) foundry processes.
MEMS are found in the following:
- Optical switching in data communications
- MEMS Optical Switches
- Bio-MEMS
- Inkjet Printers
- Accelerometers
- MEMS gyroscopes
- MEMS microphones
- Pressure sensors: silicon, car tire and blood pressure
- Displays with several hundred thousand micro mirrors
MEMS devices typically combine electronic circuitry with mechanical structures to produce different outcomes. With optical switches, the key mechanical components are MEMS-based micro-machined mirrors. These are created with silicon chips using well-established, very-large-scale integration and complementary metal-oxide semiconductor (CMOS) foundry processes.
